Multi-wafer Rotating MEMS Machines

ISBN: 9780387777467

出版年: 2009-9

页数: 472

定价: $ 236.17

内容简介

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.