VLSI Fabrication Principles

副标题: Silicon and Gallium Arsenide, 2nd Edition

ISBN: 9780471580058

出版社: Wiley-Interscience

出版年: 1994-3-14

页数: 864

定价: USD 172.00

装帧: Hardcover

内容简介

Fully updated with the latest technologies, this edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium arsenide. Stresses fabrication criteria for such circuits as CMOS, bipolar, MOS, FET, etc. These diverse technologies are introduced separately and then consolidated into complete circuits.

An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.