Handbook of Sputter Deposition Technology

副标题: Principles, Technology and Applications (Materials Science and Process Technology Series)

ISBN: 9780815512806

出版社: Noyes Publications

出版年: 1992-02-01

页数: 320

定价: USD 140.00

装帧: Hardcover

内容简介

This book presents a concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.